Process flow

Fine particles are removed using a fluorinated solvent. High cleaning and drying performance can be achieved by immersion cleaning in the first tank and vapor cleaning in the second tank.

The cleanliness inside the cleaning tank increases by the perforated plate and circulating the cleaning chemicals. Purification efficiently becomes high without being affected by particle specific gravity or water flow.

1. The cleaning chemical that has passed through the suction filter is supplied into the tank after filtering.
2. The sedimented particles are discharged from the bottom of the tank.
3. Floating particles are discharged from the perforated plate into the intermediate chamber.
4. The surfaced particles are discharged into the reserve tank by overflow.
   *The balance of 1 to 4 can be adjusted by using the installed valves.

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