Advantages of co-solvent cleaning

Our COSOL uses a hydrocarbon solvent for cleanning and dissolving contaminants, followed by liquid substitution through a fluorinated solvent. Using two different solvents, the system delivers powerful cleaning, fast drying, and a perfect finish regardless of the type of contaminants.

Hydrocarbon solvents
Superior cleaning performance compared to aqueous cleaning chemistries
Strong cleaning performance for oil-based contaminants
Solvent can be recycled through distillation-regeneration process

Fluorinated solvents
Excellent permeability enabling removal of contaminants in cracks
Smooth substitution for hydrocarbon solvents
Superior drying performance with low latent heat of vaporization

Applications

• Parts such as polygon mirrors which require high precision cleaning
• Parts which have both water-soluble and oil-based contaminants
• Precision metal parts which overlap with each other or have holes
• Electronic components which are sensitive to high temperature

Process flows

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